PRODUCTION OF HIGH-PURITY NITROGEN TRIFLUORIDE GAS

PROBLEM TO BE SOLVED: To obtain a high-purity NF3 gas by using acidic ammonium fluoride prepared by reacting a HF gas having a specific purity with an NH3 gas as an electrolyte and carrying out molten electrolysis by using a high-purity Ni electrolyte. SOLUTION: A HF gas having >=99.8wt.% purity...

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Hauptverfasser:	SHINOZAKI TAKEKI, YOSHINO TADASHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR CHEMISTRY COMPOUNDS THEREOF ELECTROLYTIC OR ELECTROPHORETIC PROCESSES ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTIONOF COMPOUNDS OR NON-METALS INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
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