TRANSFERRING MECHANISM AND INSPECTING APPARATUS WITH THE SAME

PROBLEM TO BE SOLVED: To make it possible to transfer an element to be inspected next while inspecting an element to be inspected by a test head, to continuously operate a tester and to improve the operating efficiency by providing first and second transferring means for alternately transferring the...

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Bibliographische Detailangaben
1. Verfasser: ARIGA TAKESHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To make it possible to transfer an element to be inspected next while inspecting an element to be inspected by a test head, to continuously operate a tester and to improve the operating efficiency by providing first and second transferring means for alternately transferring the elements to be inspected. SOLUTION: The transferring mechanism 23 for transferring an element to be inspected between loading and unloading regions and a test head has first and second transferring means 233, 234 for alternately transferring the element to be inspected, and switch means 235 for alternately switching and coupling the means 233, 234. The mechanism 23 further has first drive means 231 for reciprocating to move the means 235 between the loading and unloading regions and the head, and article detecting means 236 for detecting the means 233, 234 moving via the means 231. Further, the mechanism 23 has the moving amount detecting means for detecting the moving amounts of the means 233, 234 based on the detected result of the means 236.