MEASURING METHOD FOR LATTICE DISTORTION OF CRYSTAL

PROBLEM TO BE SOLVED: To provide a method for detecting the correct lattice deflection of a crystal by correcting a nonuniform diffracted X-ray intensity distribution of an X-ray topograph that is not derived from the crystallinity of a sample crystal. SOLUTION: This measuring method uses an X-ray t...

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Hauptverfasser: RYU KOSUKE, KAWATO SEIJI, KUDO YOSHIHIRO
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creator RYU KOSUKE
KAWATO SEIJI
KUDO YOSHIHIRO
description PROBLEM TO BE SOLVED: To provide a method for detecting the correct lattice deflection of a crystal by correcting a nonuniform diffracted X-ray intensity distribution of an X-ray topograph that is not derived from the crystallinity of a sample crystal. SOLUTION: This measuring method uses an X-ray topograph taking optical system to take an X-ray topograph and, at the same time, measures a diffracted X-ray intensity curve. Next, the difference in Bragg condition of a sample crystal is calculated from the diffracted X-ray intensity curve, the peak intensity fluctuations of the diffracted X-ray intensity curve in continuous regions are calculated, and using these values, the diffracted X-ray intensity distribution of the X-ray topograph of the sample crystal is corrected; the fluctuation ratio Δd/(d) of the lattice spacing and the fluctuation Δα of the lattice azimuth, both of which do not contain components which are not derived from crystallinity, from the diffracted X-ray intensity distribution corrected are calculated.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title MEASURING METHOD FOR LATTICE DISTORTION OF CRYSTAL
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