ION INPLANTING DEVICE

PROBLEM TO BE SOLVED: To blow dusts adhered to human body, fitting parts, tools or the like and effectively restrict discharge phenomenon due to dusts by entering and exiting the inside of a shield cabinet via a shower chamber. SOLUTION: When someone enters inside a shield cabinet 6 for replenishmen...

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Bibliographische Detailangaben
1. Verfasser: NIIYAMA TETSUO
Format: Patent
Sprache:eng
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