ION INPLANTING DEVICE

ION INPLANTING DEVICE

PROBLEM TO BE SOLVED: To blow dusts adhered to human body, fitting parts, tools or the like and effectively restrict discharge phenomenon due to dusts by entering and exiting the inside of a shield cabinet via a shower chamber. SOLUTION: When someone enters inside a shield cabinet 6 for replenishmen...

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1. Verfasser: NIIYAMA TETSUO
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator NIIYAMA TETSUO
description PROBLEM TO BE SOLVED: To blow dusts adhered to human body, fitting parts, tools or the like and effectively restrict discharge phenomenon due to dusts by entering and exiting the inside of a shield cabinet via a shower chamber. SOLUTION: When someone enters inside a shield cabinet 6 for replenishment of the ion source gas of a high voltage part 1 or ion source maintenance and service or the like, a touch switch is pressed to open a door 21 and a shower part 30 is driven if someone having fitting parts and tools or the like of the ion source enters the inside a shower chamber 20. When someone enters inside the shower chamber 20 with the door closed, a circulated air A blows out through a fine filter and blows the dusts adhered to human body, fitting parts, and tools or the like, the air is discharged from the air discharge port inside shower chamber 20 and is re-circulated via the fine filter by means of a circulation fan provided at the upper part thereof. Thereby, the discharge phenomenon due to dusts can be restricted effectively.
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SOLUTION: When someone enters inside a shield cabinet 6 for replenishment of the ion source gas of a high voltage part 1 or ion source maintenance and service or the like, a touch switch is pressed to open a door 21 and a shower part 30 is driven if someone having fitting parts and tools or the like of the ion source enters the inside a shower chamber 20. When someone enters inside the shower chamber 20 with the door closed, a circulated air A blows out through a fine filter and blows the dusts adhered to human body, fitting parts, and tools or the like, the air is discharged from the air discharge port inside shower chamber 20 and is re-circulated via the fine filter by means of a circulation fan provided at the upper part thereof. 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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title ION INPLANTING DEVICE
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