MANUFACTURE OF SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To obtain a semiconductor device which eliminates a cause obstructing the performance of a high-speed operation when a bipolar transistor is formed, in with the performance of the high-speed operation of every transistor is not different when, e.g. the effective emitter size of...

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1. Verfasser: SHINOHARA MAMORU
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description PROBLEM TO BE SOLVED: To obtain a semiconductor device which eliminates a cause obstructing the performance of a high-speed operation when a bipolar transistor is formed, in with the performance of the high-speed operation of every transistor is not different when, e.g. the effective emitter size of one transistor becomes larger than the effective emitter size of the other and in which a MIS(metal insulation silicon) capacitance is formed simultaneously without largely increasing a process. SOLUTION: In the manufacturing method of a semiconductor device which comprises a bipolar transistor and a MIS capacitance element, insulating films 7 which are composed of SiO2 , SiN or the like are formed in the base formation region and the MIS capacitance III formation region of at least a bipolar transistor II on the surface of a semiconductor substrate, the insulating film 7 at least on an emitter formation region is removed, and conductors 8', 8" which are composed of poly-Si are formed in arbitrary regions on the surface of the semiconductor substrate in such a way that at least the region in which the insulating film is removed and the MIS capacitance formation region are included.
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SOLUTION: In the manufacturing method of a semiconductor device which comprises a bipolar transistor and a MIS capacitance element, insulating films 7 which are composed of SiO2 , SiN or the like are formed in the base formation region and the MIS capacitance III formation region of at least a bipolar transistor II on the surface of a semiconductor substrate, the insulating film 7 at least on an emitter formation region is removed, and conductors 8', 8" which are composed of poly-Si are formed in arbitrary regions on the surface of the semiconductor substrate in such a way that at least the region in which the insulating film is removed and the MIS capacitance formation region are included.</description><edition>6</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>1997</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19970905&amp;DB=EPODOC&amp;CC=JP&amp;NR=H09232439A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19970905&amp;DB=EPODOC&amp;CC=JP&amp;NR=H09232439A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SHINOHARA MAMORU</creatorcontrib><title>MANUFACTURE OF SEMICONDUCTOR DEVICE</title><description>PROBLEM TO BE SOLVED: To obtain a semiconductor device which eliminates a cause obstructing the performance of a high-speed operation when a bipolar transistor is formed, in with the performance of the high-speed operation of every transistor is not different when, e.g. the effective emitter size of one transistor becomes larger than the effective emitter size of the other and in which a MIS(metal insulation silicon) capacitance is formed simultaneously without largely increasing a process. 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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title MANUFACTURE OF SEMICONDUCTOR DEVICE
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