FLAW INSPECTION METHOD AND DEVICE

PROBLEM TO BE SOLVED: To sense a flaw of any object to be inspected with high precision and over a wide range by preventing influence of a frame stray light. SOLUTION: Each position on an object to be inspected 20 is irradiated with scanning beams BM in the first and the second irradiating direction...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	HAYANO FUMITOMO
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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