METHOD FOR VAPOR-DEPOSITING METALLIC OXIDE THIN FILM

PROBLEM TO BE SOLVED: To continuously and stably form a metallic oxide thin film by vapor deposition on a running plastic film or sheet by an electron beam system. SOLUTION: This continuous vapor deposition film forming process is the one in which a metallic oxide solid is charged to a rotary hearth...

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Bibliographische Detailangaben
Hauptverfasser: TOYAMA SHUNROKU, MOCHIZUKI KIYOTO
Format: Patent
Sprache:eng
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