LASER BEAM PROCESSING METHOD

PURPOSE: To form a via hole of a desired depth and diameter at a multilayered wiring board with good accuracy by concentrically irradiating this wiring board with a laser beam and detecting the main peak of the intrinsic line spectrum generated in an inner layer conductor formed with this hole. CONS...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SATO HIDEMI, TAIKO YOICHI, TERABAYASHI TAKAO, AMAMIYA KYOKO
Format: Patent
Sprache:eng
Schlagworte:
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