LID OPENING/CLOSING DEVICE OF SEMICONDUCTOR MANUFACTURING DEVICE

LID OPENING/CLOSING DEVICE OF SEMICONDUCTOR MANUFACTURING DEVICE

PURPOSE: To improve the degree of freedom of layout configuration of a semiconductor manufacturing device by eliminating the restriction regarding the interlocking surface of a treatment container due to a lid opening/closing device. CONSTITUTION: In a semiconductor manufacturing device which is pro...

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Hauptverfasser: SATO SATOSHI, SAKA KENICHI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator SATO SATOSHI
SAKA KENICHI
description PURPOSE: To improve the degree of freedom of layout configuration of a semiconductor manufacturing device by eliminating the restriction regarding the interlocking surface of a treatment container due to a lid opening/closing device. CONSTITUTION: In a semiconductor manufacturing device which is provided with a plurality of treatment containers 11 and 111 which can be opened and closed by a lid 12, mutually interlocks the treatment containers 11 and 111 at the side part, and at the same time houses a substrate in the treatment container for performing a specific treatment, the lid 12 is supported so that it can be rotated freely by a support shaft 14 and drive mechanisms 17, 19, 25, and 27 for opening and closing the treatment container 11 by rotating the lid 12 are provided at the upper portion of the interlocking part L/V between the treatment containers 11 and 111.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title LID OPENING/CLOSING DEVICE OF SEMICONDUCTOR MANUFACTURING DEVICE
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