SEMICONDUCTOR OPTICAL ELEMENT AND FABRICATION THEREOF

PURPOSE: To obtain a high quality high performance optical element or optical integrated element by enhancing the controllability of the compositional ratio of group III element in a mixed crystal semiconductor layer containing In there by growing a core layer having a large critical film thickness....

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KANETAKE TATSURO, SUZUKI MAKOTO, AOKI MASAHIRO, OHIRA MASATERU
Format: Patent
Sprache:eng
Schlagworte:
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