SPUTTERING DEVICE FOR OPTICAL DISK

PURPOSE: To facilitate the exchange treatment of treating members to be exchanged at the time of changing the kinds of optical disks to be treated with a sputtering device which executes sputtering on plural kinds of the optical disks varying in diameters and the diameters of center shape parts. CON...

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Bibliographische Detailangaben
1. Verfasser: SATOU KATSUYORI
Format: Patent
Sprache:eng
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