FORMATION OF PATTERN

PURPOSE: To provide a patterning method for photomasks, etc., by a lift-off method necessitating just one time of patterning. CONSTITUTION: A mask 13A for plating is disposed on a conductive layer 11 on a transparent substrate 10 and is then subjected to plating, by which plating films 15 are select...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: TAKEI SHIGEO
Format: Patent
Sprache:eng
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