WAFER HOUSING METHOD IN SLICING MACHINE AND DEVICE THEREOF

PURPOSE: To simplify the structure of a device and consequently contrive to reduce failure rate. CONSTITUTION: A wafer (w) cut with an annular cutting edge is suckingly supported by a suction pad 3 so as to transport the wafer (w) under horizontal state rearward in order to transport the wafer in a...

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1. Verfasser: KUSHIDA RYOZO
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creator KUSHIDA RYOZO
description PURPOSE: To simplify the structure of a device and consequently contrive to reduce failure rate. CONSTITUTION: A wafer (w) cut with an annular cutting edge is suckingly supported by a suction pad 3 so as to transport the wafer (w) under horizontal state rearward in order to transport the wafer in a wafer housing cassette 11. After that, the sucking action of the suction pad 3 is released. After that, by raising the cassette 11 one step by one step successively, the supplied wafer (w) is placed on a housing shelf of the cassette 11. Accordingly, since the wafer is supplied directly to the cassette by being transported rearward as is sucked by the suction pad, the constitution of the device is simple. Further, by utilizing an one-pitch cylinder for raising the cassette, the raising of one pitch of the cassette is exact and durable.
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CONSTITUTION: A wafer (w) cut with an annular cutting edge is suckingly supported by a suction pad 3 so as to transport the wafer (w) under horizontal state rearward in order to transport the wafer in a wafer housing cassette 11. After that, the sucking action of the suction pad 3 is released. After that, by raising the cassette 11 one step by one step successively, the supplied wafer (w) is placed on a housing shelf of the cassette 11. Accordingly, since the wafer is supplied directly to the cassette by being transported rearward as is sucked by the suction pad, the constitution of the device is simple. Further, by utilizing an one-pitch cylinder for raising the cassette, the raising of one pitch of the cassette is exact and durable.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
WORKING CEMENT, CLAY, OR STONE
WORKING STONE OR STONE-LIKE MATERIALS
title WAFER HOUSING METHOD IN SLICING MACHINE AND DEVICE THEREOF
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