METHOD FOR ANALYZING CONCENTRATION DISTRIBUTION

PURPOSE: To correctly analyze not only the distribution of specific ions in the depthwise direction of sample substrates, but the concentration distribution in the horizontal direction to the substrates by sequentially calculating differences of results of mass analyses of sample substrates where du...

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Bibliographische Detailangaben

1. Verfasser:	TANIGAKI TAKESHIGE
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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