ELECTROSTATIC CHUCK IN WHICH CORROSIVENESS IS IMPROVED

PROBLEM TO BE SOLVED: To suppress the corrosion of an insulator for supporting an electrode and a substrate having an elevated central part covering the electrode and a lower peripheral part extending over the electrode by forming a step part between the central part and the peripheral part. SOLUTIO...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JIYON EFU KIYAMERON, SHIYAMOUIRU SHIYAMOUIRIAN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION SEMICONDUCTOR DEVICES
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