ELECTROSTATIC CHUCK IN WHICH CORROSIVENESS IS IMPROVED
PROBLEM TO BE SOLVED: To suppress the corrosion of an insulator for supporting an electrode and a substrate having an elevated central part covering the electrode and a lower peripheral part extending over the electrode by forming a step part between the central part and the peripheral part. SOLUTIO...
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| creator | JIYON EFU KIYAMERON SHIYAMOUIRU SHIYAMOUIRIAN |
| description | PROBLEM TO BE SOLVED: To suppress the corrosion of an insulator for supporting an electrode and a substrate having an elevated central part covering the electrode and a lower peripheral part extending over the electrode by forming a step part between the central part and the peripheral part. SOLUTION: An insulator 22 has a central part 25 covering an electrode 24 and supporting a substrate 42, and a peripheral part 26 spreading over the electrode 24. The central part 25 is elevated as compared with the peripheral part 26, thus forming a step part 27. The step part 27 has height of about 10 μm or less, preferably of about 5 μm. This structure suppresses corrosion at the exposed peripheral part of the insulator 22. |
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SOLUTION: An insulator 22 has a central part 25 covering an electrode 24 and supporting a substrate 42, and a peripheral part 26 spreading over the electrode 24. The central part 25 is elevated as compared with the peripheral part 26, thus forming a step part 27. The step part 27 has height of about 10 μm or less, preferably of about 5 μm. This structure suppresses corrosion at the exposed peripheral part of the insulator 22.</description><edition>6</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; GENERATION ; SEMICONDUCTOR DEVICES</subject><creationdate>1996</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19960702&DB=EPODOC&CC=JP&NR=H08172786A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19960702&DB=EPODOC&CC=JP&NR=H08172786A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>JIYON EFU KIYAMERON</creatorcontrib><creatorcontrib>SHIYAMOUIRU SHIYAMOUIRIAN</creatorcontrib><title>ELECTROSTATIC CHUCK IN WHICH CORROSIVENESS IS IMPROVED</title><description>PROBLEM TO BE SOLVED: To suppress the corrosion of an insulator for supporting an electrode and a substrate having an elevated central part covering the electrode and a lower peripheral part extending over the electrode by forming a step part between the central part and the peripheral part. SOLUTION: An insulator 22 has a central part 25 covering an electrode 24 and supporting a substrate 42, and a peripheral part 26 spreading over the electrode 24. The central part 25 is elevated as compared with the peripheral part 26, thus forming a step part 27. The step part 27 has height of about 10 μm or less, preferably of about 5 μm. 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SOLUTION: An insulator 22 has a central part 25 covering an electrode 24 and supporting a substrate 42, and a peripheral part 26 spreading over the electrode 24. The central part 25 is elevated as compared with the peripheral part 26, thus forming a step part 27. The step part 27 has height of about 10 μm or less, preferably of about 5 μm. This structure suppresses corrosion at the exposed peripheral part of the insulator 22.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION SEMICONDUCTOR DEVICES |
| title | ELECTROSTATIC CHUCK IN WHICH CORROSIVENESS IS IMPROVED |
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