METHOD OF FEEDING WASHING LIQUID FOR REAR OF SUBSTRATE FOR ROTARY COATING AND DEVICE THEREFOR

PURPOSE: To solve problems on heat generation and sealing of the boundary surface with a rotating shaft with respect to a feeding method of washing liquid for preventing and removing unnecessary coating on the rear of a substrate to be coated in a rotary coating device using centrifugal force to app...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KASHIWAGI TOSHIO, KOTOYORI MASAHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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