FIELD-EFFECT ELEMENT AND FORMATION METHOD OF ITS ELECTRODE
PURPOSE: To provide a field-effect element and its electrode forming method capable for forming the electric contacts of an element aligning them automatically, without a contact hole forming process, in a wiring process between electrodes of a kind of silicon, metal or different kinds of metals. CO...
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| creator | KIN JIYOKAN KIYOU SEIGEN KIYOU GENKIYUU YANAGI SHIYOUZEN |
| description | PURPOSE: To provide a field-effect element and its electrode forming method capable for forming the electric contacts of an element aligning them automatically, without a contact hole forming process, in a wiring process between electrodes of a kind of silicon, metal or different kinds of metals. CONSTITUTION: Parts of an insulating film 48 on field oxide films 40 and on parts where electrode contacts of wiring electrodes, electrodes of a kind of silicon, electrodes of different kinds of metals are formed are removed, and only parts surrounding the region of a gate electrode, i.e., gate oxide films 48a, 48b are left unremoved. And a substance for wiring electrodes is applied, and the substance is patterned after that and wiring electrodes 49 are formed. |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | FIELD-EFFECT ELEMENT AND FORMATION METHOD OF ITS ELECTRODE |
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