PHOTO-MASK

PURPOSE: To prevent an ill effect caused by the sticking of foreign matter and the like by forming a photo-mask itself with a nontranslucent material, using a translucent region formed on this material as a translucent region portion, and using the other region as a shielding region portion. CONSTIT...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUGITANI SATOYUKI, HAMAMOTO TATSUO, KUJI TAKAAKI, IZUMI AKIYA, SHIMIZU HIROMASA, KUBO AKIKO, TSUBOKA TOMOAKI
Format: Patent
Sprache:eng
Schlagworte:
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