IRRADIATION APPARATUS
PURPOSE: To provide an irradiation apparatus constituted to move the position of a spot light source in its optical axis direction in such a manner that irradiation light from this spot light source is reflected by a reflection mirror so as to be made into parallel rays. CONSTITUTION: A mounting bar...
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| creator | YAMADA HIROSHI NAGAYAMA SADAO TSUKAMOTO YASUO |
| description | PURPOSE: To provide an irradiation apparatus constituted to move the position of a spot light source in its optical axis direction in such a manner that irradiation light from this spot light source is reflected by a reflection mirror so as to be made into parallel rays. CONSTITUTION: A mounting bar 7 mounted with a UV lamp 1 is inserted into the center of a lamp holder 5 and is supported freely rotatably by a bearing 6. This lamp holder 5 is provided at its both ends with adjusting screws 4. The lamp holder 5 is moved by rotating these adjusting screws 4, by which the relative position of the UV lamp 1 and the reflection mirror 2 which is a paraboloid of revolution is adjusted. The UV lamp 1 is thus placed at the focal position of the reflection mirror 2 and the irradiation light thereof has the uniform illuminance to a photosensitive resist surface. |
| format | Patent |
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CONSTITUTION: A mounting bar 7 mounted with a UV lamp 1 is inserted into the center of a lamp holder 5 and is supported freely rotatably by a bearing 6. This lamp holder 5 is provided at its both ends with adjusting screws 4. The lamp holder 5 is moved by rotating these adjusting screws 4, by which the relative position of the UV lamp 1 and the reflection mirror 2 which is a paraboloid of revolution is adjusted. The UV lamp 1 is thus placed at the focal position of the reflection mirror 2 and the irradiation light thereof has the uniform illuminance to a photosensitive resist surface.</description><edition>6</edition><language>eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 ; NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE</subject><creationdate>1996</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19960430&DB=EPODOC&CC=JP&NR=H08109482A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19960430&DB=EPODOC&CC=JP&NR=H08109482A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YAMADA HIROSHI</creatorcontrib><creatorcontrib>NAGAYAMA SADAO</creatorcontrib><creatorcontrib>TSUKAMOTO YASUO</creatorcontrib><title>IRRADIATION APPARATUS</title><description>PURPOSE: To provide an irradiation apparatus constituted to move the position of a spot light source in its optical axis direction in such a manner that irradiation light from this spot light source is reflected by a reflection mirror so as to be made into parallel rays. CONSTITUTION: A mounting bar 7 mounted with a UV lamp 1 is inserted into the center of a lamp holder 5 and is supported freely rotatably by a bearing 6. This lamp holder 5 is provided at its both ends with adjusting screws 4. The lamp holder 5 is moved by rotating these adjusting screws 4, by which the relative position of the UV lamp 1 and the reflection mirror 2 which is a paraboloid of revolution is adjusted. The UV lamp 1 is thus placed at the focal position of the reflection mirror 2 and the irradiation light thereof has the uniform illuminance to a photosensitive resist surface.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25</subject><subject>NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1996</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBD1DApydPF0DPH091NwDAhwDHIMCQ3mYWBNS8wpTuWF0twMim6uIc4euqkF-fGpxQWJyal5qSXxXgEeBhaGBpYmFkaOxsSoAQCsGR9F</recordid><startdate>19960430</startdate><enddate>19960430</enddate><creator>YAMADA HIROSHI</creator><creator>NAGAYAMA SADAO</creator><creator>TSUKAMOTO YASUO</creator><scope>EVB</scope></search><sort><creationdate>19960430</creationdate><title>IRRADIATION APPARATUS</title><author>YAMADA HIROSHI ; NAGAYAMA SADAO ; TSUKAMOTO YASUO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JPH08109482A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1996</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25</topic><topic>NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE</topic><toplevel>online_resources</toplevel><creatorcontrib>YAMADA HIROSHI</creatorcontrib><creatorcontrib>NAGAYAMA SADAO</creatorcontrib><creatorcontrib>TSUKAMOTO YASUO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>YAMADA HIROSHI</au><au>NAGAYAMA SADAO</au><au>TSUKAMOTO YASUO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>IRRADIATION APPARATUS</title><date>1996-04-30</date><risdate>1996</risdate><abstract>PURPOSE: To provide an irradiation apparatus constituted to move the position of a spot light source in its optical axis direction in such a manner that irradiation light from this spot light source is reflected by a reflection mirror so as to be made into parallel rays. CONSTITUTION: A mounting bar 7 mounted with a UV lamp 1 is inserted into the center of a lamp holder 5 and is supported freely rotatably by a bearing 6. This lamp holder 5 is provided at its both ends with adjusting screws 4. The lamp holder 5 is moved by rotating these adjusting screws 4, by which the relative position of the UV lamp 1 and the reflection mirror 2 which is a paraboloid of revolution is adjusted. The UV lamp 1 is thus placed at the focal position of the reflection mirror 2 and the irradiation light thereof has the uniform illuminance to a photosensitive resist surface.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE |
| title | IRRADIATION APPARATUS |
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