LIGHT-EMITTING DEVICE

LIGHT-EMITTING DEVICE

PURPOSE:To provide a light-emitting device constituted by using silicon as the substrate, particularly a light-emitting device fabricated using porous silicon as the substrate. CONSTITUTION:The surface of a single crystal silicon substrate 10 is turned porous through anodizing at a current density o...

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Hauptverfasser: MATSUMOTO TAKAHIRO, MIMURA SHUSUKE
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator MATSUMOTO TAKAHIRO
MIMURA SHUSUKE
description PURPOSE:To provide a light-emitting device constituted by using silicon as the substrate, particularly a light-emitting device fabricated using porous silicon as the substrate. CONSTITUTION:The surface of a single crystal silicon substrate 10 is turned porous through anodizing at a current density of 5-50mA/cm in a hydrofluoric acid solution, and the current density is increased to 600mA/cm or more and electrolytic polishing is conducted, thus removing the porous portion from the silicon substrate. After the removal, muc-SiC 30 is deposited on the surface of the single crystal silicon substrate, and a P-N junction is formed between muc-SiC 30 and the single crystal silicon substrate. Silicon crystal particles 24 produced when the porous portion is formed are left on the surface of the single crystal silicon substrate after the porous portion is removed, and the silicon crystal particles 24 are used as the luminescent center of EL emission.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title LIGHT-EMITTING DEVICE
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