GAS MASS FLOW RATE CONTROLLER

PURPOSE:To reduce the space occupied by a pipeline casing by using a sensor pipe of the comparatively short length at a mass/flow rate sensor part and also by dividing a control base board into plural pieces. CONSTITUTION:When the gas flows through a fluid path 2, part of the gas flows through a sen...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TANAKA MAKOTO, KAZAMA YOICHIRO
Format: Patent
Sprache:eng
Schlagworte:
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