CHARGED PARTICLE EMITTING DEVICE

PURPOSE:To scan a charged particle beam at high speed with a simple device structure by providing a charged particle source, a quadrupole lens for converting the charged particle beam generated from the charged particle source, and a means for scanning a wide beam. CONSTITUTION:The charged particle beam of electron beam or ion beam emitted from a charged particle source 1 is passed through a quadrupole lens 5, whereby it is formed into a widely spread charged particle beam 3. In the sectional form 10 of the emitting surface, the central part of the wide charged particle beam is slightly swollen. This wide beam 3 is scanned in the orthogonal direction 11 by use of' the same scanning electrode as in the past, whereby a two-dimensional beam emission can be applied to a body to be emitted. Thus, a high-speed and uniform emission can be performed by the wide beam formed by use of the quadrupole lens 5.