TRANSPORT SYSTEM OF SUBSTRATE AND METHOD FOR TRANSPORTING SUBSTRATE

PURPOSE:To provide a transport system for local cleaning suited for a single wafer type semiconductor substrate treatment device or a single wafer type LC substrate treatment device. CONSTITUTION:A storage container 2 of a substrate 11 which can be carried airtightly and can be connected is provided...

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Bibliographische Detailangaben
Hauptverfasser:	OOYA NOBUAKI, OKUBO MAMORU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING HANDLING THIN OR FILAMENTARY MATERIAL NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE:To provide a transport system for local cleaning suited for a single wafer type semiconductor substrate treatment device or a single wafer type LC substrate treatment device. CONSTITUTION:A storage container 2 of a substrate 11 which can be carried airtightly and can be connected is provided at a connection means 7 which is adjacent to a gate valve 6 provided at a load lock chamber 4 which is adjacent to a treatment chamber 3 via a gate valve 5.