SURFACE TREATING DEVICE

PURPOSE:To evenly and uniformly etch the front and rear faces of a material to be treated by washing the material, then treating the material surface in an etching part provided with a disk which is eccentrically rotated, then performing washing and drying the material. CONSTITUTION:The front and re...

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Hauptverfasser: OKI NOBUAKI, TAKANASHI YASUO, NOHARA SHOZO, HIROYA YOSHINOBU, YOSHITOMI SATOSHI
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creator OKI NOBUAKI
TAKANASHI YASUO
NOHARA SHOZO
HIROYA YOSHINOBU
YOSHITOMI SATOSHI
description PURPOSE:To evenly and uniformly etch the front and rear faces of a material to be treated by washing the material, then treating the material surface in an etching part provided with a disk which is eccentrically rotated, then performing washing and drying the material. CONSTITUTION:The front and rear faces of a material 90 such as a steel sheet or plate with a resist pattern formed thereon are washed in a first washing part 10, then, the material is introduced into an etching chamber 20 vertically to the horizontal and fixed to a disk 31 placed on an origin roller 33, and the disk 31 is put on an eccentric roller 32 by operating cylinders 34 and 35. Then disk 31 is eccentrically rotated by the eccentric roller 32, an etchant is injected uniformly on both sides of the material 90 on the disk 31, air is then injected by an air knife mechanism 40 to remove the etchant, and etching is stopped. The material 90 is washed in a second washing part 50 and dried in a drying part 60, and the material is evenly and uniformly etched by the etchant.
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TAKANASHI YASUO ; NOHARA SHOZO ; HIROYA YOSHINOBU ; YOSHITOMI SATOSHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JPH06122981A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1994</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>CINEMATOGRAPHY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</topic><topic>MATERIALS THEREFOR</topic><topic>METALLURGY</topic><topic>MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25</topic><topic>NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><topic>PRINTED CIRCUITS</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>OKI NOBUAKI</creatorcontrib><creatorcontrib>TAKANASHI YASUO</creatorcontrib><creatorcontrib>NOHARA SHOZO</creatorcontrib><creatorcontrib>HIROYA YOSHINOBU</creatorcontrib><creatorcontrib>YOSHITOMI SATOSHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>OKI NOBUAKI</au><au>TAKANASHI YASUO</au><au>NOHARA SHOZO</au><au>HIROYA YOSHINOBU</au><au>YOSHITOMI SATOSHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SURFACE TREATING DEVICE</title><date>1994-05-06</date><risdate>1994</risdate><abstract>PURPOSE:To evenly and uniformly etch the front and rear faces of a material to be treated by washing the material, then treating the material surface in an etching part provided with a disk which is eccentrically rotated, then performing washing and drying the material. CONSTITUTION:The front and rear faces of a material 90 such as a steel sheet or plate with a resist pattern formed thereon are washed in a first washing part 10, then, the material is introduced into an etching chamber 20 vertically to the horizontal and fixed to a disk 31 placed on an origin roller 33, and the disk 31 is put on an eccentric roller 32 by operating cylinders 34 and 35. Then disk 31 is eccentrically rotated by the eccentric roller 32, an etchant is injected uniformly on both sides of the material 90 on the disk 31, air is then injected by an air knife mechanism 40 to remove the etchant, and etching is stopped. The material 90 is washed in a second washing part 50 and dried in a drying part 60, and the material is evenly and uniformly etched by the etchant.</abstract><edition>5</edition><oa>free_for_read</oa></addata></record>
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
CINEMATOGRAPHY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
MATERIALS THEREFOR
METALLURGY
MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
PRINTED CIRCUITS
SEMICONDUCTOR DEVICES
title SURFACE TREATING DEVICE
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