JPH0580591B

PURPOSE:To prevent fly-up phenomenon of dust in a vacuum chamber as well as adhesion of dust to a specimen by a method wherein an evacuating path and a leak path are constituted so that the evacuating pressure and the leak pressure thereof are capable of being switched in a plurality of steps. CONST...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	SAITO NAOTAKE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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