JPH0580591B

PURPOSE:To prevent fly-up phenomenon of dust in a vacuum chamber as well as adhesion of dust to a specimen by a method wherein an evacuating path and a leak path are constituted so that the evacuating pressure and the leak pressure thereof are capable of being switched in a plurality of steps. CONST...

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1. Verfasser:	SAITO NAOTAKE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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creator	SAITO NAOTAKE
description	PURPOSE:To prevent fly-up phenomenon of dust in a vacuum chamber as well as adhesion of dust to a specimen by a method wherein an evacuating path and a leak path are constituted so that the evacuating pressure and the leak pressure thereof are capable of being switched in a plurality of steps. CONSTITUTION:A main evacuating pump system 5 and a preliminary evacuating pump system 7 are connected to a vacuum vessel 1. The leak path, connected with pressure regulating valves 12, 13, 14 having different set pressures in parallel, is connected to the vacuum vessel 1. In the case of evacuating, the evacuating is effected at first by the preliminary evacuating pump system 7 slowly, thereafter, the system is switched to the main evacuating pump system 5 to evacuate quickly when a vacuum has arrived at a predetermined vacuum pressure. On the other hand, the pressure regulating valve 12, provided with a lower leak pressure, is opened in the case of leak and the leaking is effected slowly at first, then, it is effected more quickly sequentially.
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CONSTITUTION:A main evacuating pump system 5 and a preliminary evacuating pump system 7 are connected to a vacuum vessel 1. The leak path, connected with pressure regulating valves 12, 13, 14 having different set pressures in parallel, is connected to the vacuum vessel 1. In the case of evacuating, the evacuating is effected at first by the preliminary evacuating pump system 7 slowly, thereafter, the system is switched to the main evacuating pump system 5 to evacuate quickly when a vacuum has arrived at a predetermined vacuum pressure. On the other hand, the pressure regulating valve 12, provided with a lower leak pressure, is opened in the case of leak and the leaking is effected slowly at first, then, it is effected more quickly sequentially.</description><edition>5</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; BLASTING ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS ; PUMPS ; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ; WEAPONS</subject><creationdate>1993</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19931109&DB=EPODOC&CC=JP&NR=H0580591B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19931109&DB=EPODOC&CC=JP&NR=H0580591B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SAITO NAOTAKE</creatorcontrib><title>JPH0580591B</title><description>PURPOSE:To prevent fly-up phenomenon of dust in a vacuum chamber as well as adhesion of dust to a specimen by a method wherein an evacuating path and a leak path are constituted so that the evacuating pressure and the leak pressure thereof are capable of being switched in a plurality of steps. CONSTITUTION:A main evacuating pump system 5 and a preliminary evacuating pump system 7 are connected to a vacuum vessel 1. The leak path, connected with pressure regulating valves 12, 13, 14 having different set pressures in parallel, is connected to the vacuum vessel 1. In the case of evacuating, the evacuating is effected at first by the preliminary evacuating pump system 7 slowly, thereafter, the system is switched to the main evacuating pump system 5 to evacuate quickly when a vacuum has arrived at a predetermined vacuum pressure. On the other hand, the pressure regulating valve 12, provided with a lower leak pressure, is opened in the case of leak and the leaking is effected slowly at first, then, it is effected more quickly sequentially.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>BLASTING</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>HEATING</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS</subject><subject>PUMPS</subject><subject>PUMPS FOR LIQUIDS OR ELASTIC FLUIDS</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1993</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZOD2CvAwMLUwMLU0dOJhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFIOpyMjIlSBAB8XBxI</recordid><startdate>19931109</startdate><enddate>19931109</enddate><creator>SAITO NAOTAKE</creator><scope>EVB</scope></search><sort><creationdate>19931109</creationdate><title>JPH0580591B</title><author>SAITO NAOTAKE</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JPH0580591BB23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1993</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>BLASTING</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>HEATING</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS</topic><topic>PUMPS</topic><topic>PUMPS FOR LIQUIDS OR ELASTIC FLUIDS</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>SAITO NAOTAKE</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SAITO NAOTAKE</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>JPH0580591B</title><date>1993-11-09</date><risdate>1993</risdate><abstract>PURPOSE:To prevent fly-up phenomenon of dust in a vacuum chamber as well as adhesion of dust to a specimen by a method wherein an evacuating path and a leak path are constituted so that the evacuating pressure and the leak pressure thereof are capable of being switched in a plurality of steps. CONSTITUTION:A main evacuating pump system 5 and a preliminary evacuating pump system 7 are connected to a vacuum vessel 1. The leak path, connected with pressure regulating valves 12, 13, 14 having different set pressures in parallel, is connected to the vacuum vessel 1. In the case of evacuating, the evacuating is effected at first by the preliminary evacuating pump system 7 slowly, thereafter, the system is switched to the main evacuating pump system 5 to evacuate quickly when a vacuum has arrived at a predetermined vacuum pressure. On the other hand, the pressure regulating valve 12, provided with a lower leak pressure, is opened in the case of leak and the leaking is effected slowly at first, then, it is effected more quickly sequentially.</abstract><edition>5</edition><oa>free_for_read</oa></addata></record>
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subjects	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
title	JPH0580591B
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