JPH05338731

PURPOSE:To store and take out substrates even by a robot provided with only an arm which moves in a plane by repeating the first lowering or rising motion and the second lowering or rising motion intermittently with a particular amount for lowering or raising a carrier. CONSTITUTION:The arm 29a of a robot 29 is made to enter between semiconductor wafers stored in a carrier which has stopped temporarily, and the carrier 12 is lowered intermittently by the first dropping amount Pb to support the semi-conductor wafer 11 against the am 29a. When the arm 29a is retreated horizontally from the carrier 12 under that condition, the semi-conductor wafer 11 which the arm 29a supports is taken out from the carrier 12. When the carrier 12 is lowered by the second dropping amount Pa-Pb, the semi-conductor wafer 11 on it is kept in a condition where the wafer can be taken out any time. It is thus possible to store and take out substrates even by a robot provided with only an arm which moves in a plane.