CAPACITOR AND ITS MANUFACTURE

PURPOSE: To realize a semiconductor device with a sufficient capacity of a capacitor by sufficiently increasing a surface area by forming deep irregularities in a storage electrode to such an extent that the bottom of a first conductive layer is not exposed. CONSTITUTION: A nonconductive layer 22 is...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KIYOU SEIKUN, SHIN GENFU, KOU ZAIKOU, KIN SEITAI
Format: Patent
Sprache:eng
Schlagworte:
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