ELECTRON MICROSCOPE

ELECTRON MICROSCOPE

PURPOSE:To provide an electron microscope which is provided with a shutter device small and simple in structure and able to prevent the generation of vibration even when the shutter blade is driven. CONSTITUTION:A voltage is applied to a piezo-electric element 6 from a piezo-electric element driving...

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1. Verfasser: MUTO MASAO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator MUTO MASAO
description PURPOSE:To provide an electron microscope which is provided with a shutter device small and simple in structure and able to prevent the generation of vibration even when the shutter blade is driven. CONSTITUTION:A voltage is applied to a piezo-electric element 6 from a piezo-electric element driving circuit 8 in response to a control signal from a control circuit 9 to bend the piezo-electric element 6 so that a lever body 3 moves to the right by a very small quantity. The movement is magnified by rotation of the lever body 3 around a pin 4 and then transmitted to a shutter blade 5, which makes the action of closing an electron beam passing hole 2. When a reverse voltage is applied to the piezo-electric element 6, the element 6 is deformed in a reverse direction to open the electron beam passing hole 2 so that photographing is performed to provide an image of good quality since this device is small and vibration is not brought with the opening and closing operation of the shutter blade 5.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title ELECTRON MICROSCOPE
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