JPH0515062B

PURPOSE:To accurately fill only the inside of a groove, by a method wherein a metal is selectively grown by utilizing a conductive layer previously formed by covering the inner surface of the groove. CONSTITUTION:A film covering the whole surface is formed so that the inside of the groove 25 may bec...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HASHIMOTO CHISATO, SAITO KAZUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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