JPH0510665B

PURPOSE:To intersept leakage of a laser beam out of a device even if trouble happens in the on-off circuit of the laser beam by intersepting the path of the laser beam when a process kit is taken out of the device. CONSTITUTION:A shutter plate 11 for opening or closing a scanning opening 2a is slida...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SAWADA TAKAMASA, OOCHI OSAMU, KOBAYASHI HIROO, KIMIZUKA JUNICHI, FUJINO HITOSHI
Format: Patent
Sprache:eng
Schlagworte:
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