JPH0467346B

PURPOSE:To implement low costs and mass production, by providing mirror surfaces on the surface of the diaphragm of a pressure transducing substrate and on the wall surface which is continued to the diaphragm, providing a rough surface with a specific value or less only on the bonding surface with a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SATO SHOZO, SHIROMIZU SHUNJI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING
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