BONDING DEVICE

PURPOSE:To make it possible to clean completely all the outer peripheries of the side surface of a tool and the lower surface of the tool as well as to contrive the improvement of a cleaning efficiency. CONSTITUTION:A bonding device is provided with a bonding stage 7, on which a chip or the like is...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SATO KIMIHARU, BANDO AKIO
Format: Patent
Sprache:eng
Schlagworte:
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