SEMICONDUCTOR DEVICE

PURPOSE:To enable a reference point to be detected with high precision by a method wherein, within a planar region in the same level with one alignment mark, a focus adjusting region of beams is provided in contact with the alignment mark. CONSTITUTION:Within a planar region in the same level with o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YOKOYAMA HIROYUKI, FURUICHI OSAMU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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