SURFACE TREATMENT APPARATUS

PURPOSE:To shorten the time required for taking a boat into and taking it out of a reaction furnace and to enhance the treatment capacity of an apparatus by a method wherein, when a boat elevator is ascended, an instruction device changes a speed instruction to a low-speed instruction or a high-spee...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SANO KATSUYUKI, WAKASHIRO AKIYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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