METAL VAPOR GENERATOR

PURPOSE:To effectively utilize heat energy by irradiating the upper surface of metallic raw material in a crucible with the electron beam from an electron gun, and then by irradiating the upper surface of metallic raw material in another evaporation crucible with the reflected electron beam. CONSTITUTION:The metallic raw material 23 is contained in each evaporation crucible 22, and the upper surface 24 of the metallic raw material 23 is irradiated with each electron beam 25 so that the vapor flow 26 of metal vapor is continuously generated upwards through the molten state. The generated vapor flow 26 ascends to a vapor recovery unit 27 to be recovered in a thin film state or in a liquid drop state. The electron beam 25 discharged from each electron gun 28 is deflected in an arched shape by a deflection magnetic field to reach the upper surface of the metallic raw material 23. A part of the electron beam 25 is reflected on the upper surface of the metallic raw material 23, and the reflected electron beam 29 irradiates again the metallic raw material 23 in an arched shape. By this method, the evaporation efficiency is improved.