SPLIT TYPE SUBSTRATE HOLDER

PURPOSE:To provide the split type substrate holder which does not affect on the function to hold a substrate in spite of the presence of a partial thermal deformation by constituting the holder in such a manner that the aperture for mounting the substrate is splittable and the holder has the shape t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KAWANA TAKESHI, SAWASE FUMIHIKO, ABE KATSUO, TAKAHASHI NAOKI, DAIROKU NORIYUKI, SANO MAKOTO, KATAOKA HIROYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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