SPLIT TYPE SUBSTRATE HOLDER

PURPOSE:To provide the split type substrate holder which does not affect on the function to hold a substrate in spite of the presence of a partial thermal deformation by constituting the holder in such a manner that the aperture for mounting the substrate is splittable and the holder has the shape to confine the substrate after mounting in the holding part around the aperture. CONSTITUTION:The above-mentioned split substrate holder is so formed that the support of a mechanism for holding the substrate 10 constituted heretofore by using one sheet of plate material is splittable on the plane orthogonal with the plane formed by the substrate holder. Further, a part or more parts of the aperture diameter or aperture size on the support surface of the substrate holder are made slightly smaller than the substrate size and a groove 8 is formed in the part of the support where the support comes into contact with the substrate 10. The size of the sectional shape constituting the bottom of the groove part formed at the time when the support is assembled is slightly larger than the substrate diameter or the substrate size. The substrate 10 can, therefore, be confined by the holder divided to a plurality. In the figure, 4, 5 denote the holding plate and 11 denotes a film, respectively.