WAFER BOAT

WAFER BOAT

PURPOSE:To perfectly prevent the wafers from coming off due to rotation and oscillation for enhancing the yield by a method wherein a wafer falling preventive members are provided on a wafer boat main body. CONSTITUTION:A wafer boat 10 is composed of a wafer boat main body 11 and removable members 1...

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Hauptverfasser: NOZAWA TATSUO, TABEI TAKAHIRO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator NOZAWA TATSUO
TABEI TAKAHIRO
description PURPOSE:To perfectly prevent the wafers from coming off due to rotation and oscillation for enhancing the yield by a method wherein a wafer falling preventive members are provided on a wafer boat main body. CONSTITUTION:A wafer boat 10 is composed of a wafer boat main body 11 and removable members 12 for preventing wafers from coming off. The wafer boat main body 11 is composed of an upper plate 13, a lower plate 14 and four wafer holding members 15. Multiple slots 15a are formed on the sides of the wafer holding members 15 to hold the wafers by the slots 15a. The through holes 17, 16 to contain the members 12 are formed respectively in the upper and lower plates 13, 14. The members 12 can be taken out and are in a slender columnar shape having head parts 12a in larger diameter. The material of the members 12 is Si impregnated SiC similar to that of the main body 11. Furthermore, the members 12 are provided on the positions opposite to those of the holding members 15 arranged in a semicircular shape at the same intervals.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title WAFER BOAT
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