ALUMINUM NITRIDE POWDER AND ITS PRODUCTION

PURPOSE:To obtain high purity AlN powder of small particle size which contains little amt. of oxygen and carbon and can be sintered at a low temp. by allowing an org. Al compd. to react with NH3 in a gaseous phase to produce the amorphous precursor of AlN, calcinating and then crystallizing the prec...

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Bibliographische Detailangaben
Hauptverfasser: WAKIMURA KAZUO, HIAI ATSUHIKO, TANAKA MASAO
Format: Patent
Sprache:eng
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