PRODUCTION OF HIGHER SILANE

PURPOSE:To safely obtain high purity higher silanes at a low cost by allowing monosilane to react while circulating under conditions of specified heating temp. range and parameters expressed by specified formula. CONSTITUTION:Monosilane is diluted with inert gas such as N2 so as to obtain 10-80vol.%...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAZAWA SHOICHI, KITSUNO YUTAKA, YANO KOTARO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
Online-Zugang:	Volltext bestellen
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