SENSOR ELEMENT FOR SEMICONDUCTOR PRESSURE SENSOR

PURPOSE:To efficiently perform temperature compensation, to improve the mass-production and to reduce the cost by forming gauge resistance parts composed of diffusion layers which differ in surface impurity density on the surface of a semiconductor diaphragm. CONSTITUTION:The output voltage V when a...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	SHIBATA TOSHITAKA
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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