PLANETARY TYPE POLISHING DEVICE

PURPOSE:To polish a substance to be polished with a thick section accurately without the occurrence of bending to a carrier and damage by a method wherein first and second grooves are formed in inner and outer rings in a manner to nip the carrier from plate surfaces on both sides. CONSTITUTION:Upper...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: SAKUMA YOSHIO
Format: Patent
Sprache:eng
Schlagworte:
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