ORGANIC THIN FILM MANUFACTURING DEVICE

PURPOSE:To enable the manufacture of an organic thin film which is uniform and has no defect in structure by a method wherein at least a detecting probe of a surface pressure gauge is arranged at the position of a movable barrier and a substrate so as to enable the deviation of its detected surface...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MOTOMA NOBUHIRO, EKUSA TAKASHI, NAKAYAMA TOSHIO, MIURA AKIRA
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVES APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS CHEMISTRY DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS PERFORMING OPERATIONS POLISHES SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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