ORGANIC THIN FILM MANUFACTURING DEVICE
PURPOSE:To enable the manufacture of an organic thin film which is uniform and has no defect in structure by a method wherein at least a detecting probe of a surface pressure gauge is arranged at the position of a movable barrier and a substrate so as to enable the deviation of its detected surface...
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| creator | MOTOMA NOBUHIRO EKUSA TAKASHI NAKAYAMA TOSHIO MIURA AKIRA |
| description | PURPOSE:To enable the manufacture of an organic thin film which is uniform and has no defect in structure by a method wherein at least a detecting probe of a surface pressure gauge is arranged at the position of a movable barrier and a substrate so as to enable the deviation of its detected surface pressure from a set surface pressure to be within 10% after a compressing operation or in an accumulating operation. CONSTITUTION:At least, a detecting probe 14 of a surface pressure gauge is arranged at the position of a movable barrier 12 and a substrate 13 so as to enable the deviation of its surface pressure detected value from a set surface pressure to be within 10% after a compressing operation or in an accumulating operation. And, the surface pressure change due to the barrier 12 at a compressing operation of a molecular film by the barrier 12 can be accurately detected, and the surface pressure decrease of the molecular film near the substrate 13 can be accurately detected at an accumulating operation. Therefore, the surface pressure detected value of the detecting probe 14 of the surface pressure gauge can be used as an index that a moving rate of the movable barrier at the compression of the molecular film and an up-down speed at the accumulation of the molecular film on the substrate are controlled, whereby a molecular film which is uniform and has no defect in structure can be accumulated on a substrate. |
| format | Patent |
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CONSTITUTION:At least, a detecting probe 14 of a surface pressure gauge is arranged at the position of a movable barrier 12 and a substrate 13 so as to enable the deviation of its surface pressure detected value from a set surface pressure to be within 10% after a compressing operation or in an accumulating operation. And, the surface pressure change due to the barrier 12 at a compressing operation of a molecular film by the barrier 12 can be accurately detected, and the surface pressure decrease of the molecular film near the substrate 13 can be accurately detected at an accumulating operation. Therefore, the surface pressure detected value of the detecting probe 14 of the surface pressure gauge can be used as an index that a moving rate of the movable barrier at the compression of the molecular film and an up-down speed at the accumulation of the molecular film on the substrate are controlled, whereby a molecular film which is uniform and has no defect in structure can be accumulated on a substrate.</description><language>eng</language><subject>ADHESIVES ; APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL ; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ; BASIC ELECTRIC ELEMENTS ; CHEMISTRY ; DYES ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE ; METALLURGY ; MISCELLANEOUS APPLICATIONS OF MATERIALS ; MISCELLANEOUS COMPOSITIONS ; NATURAL RESINS ; PAINTS ; PERFORMING OPERATIONS ; POLISHES ; SEMICONDUCTOR DEVICES ; SPRAYING OR ATOMISING IN GENERAL ; TRANSPORTING</subject><creationdate>1990</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19900314&DB=EPODOC&CC=JP&NR=H0274072A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25562,76317</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19900314&DB=EPODOC&CC=JP&NR=H0274072A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MOTOMA NOBUHIRO</creatorcontrib><creatorcontrib>EKUSA TAKASHI</creatorcontrib><creatorcontrib>NAKAYAMA TOSHIO</creatorcontrib><creatorcontrib>MIURA AKIRA</creatorcontrib><title>ORGANIC THIN FILM MANUFACTURING DEVICE</title><description>PURPOSE:To enable the manufacture of an organic thin film which is uniform and has no defect in structure by a method wherein at least a detecting probe of a surface pressure gauge is arranged at the position of a movable barrier and a substrate so as to enable the deviation of its detected surface pressure from a set surface pressure to be within 10% after a compressing operation or in an accumulating operation. CONSTITUTION:At least, a detecting probe 14 of a surface pressure gauge is arranged at the position of a movable barrier 12 and a substrate 13 so as to enable the deviation of its surface pressure detected value from a set surface pressure to be within 10% after a compressing operation or in an accumulating operation. And, the surface pressure change due to the barrier 12 at a compressing operation of a molecular film by the barrier 12 can be accurately detected, and the surface pressure decrease of the molecular film near the substrate 13 can be accurately detected at an accumulating operation. Therefore, the surface pressure detected value of the detecting probe 14 of the surface pressure gauge can be used as an index that a moving rate of the movable barrier at the compression of the molecular film and an up-down speed at the accumulation of the molecular film on the substrate are controlled, whereby a molecular film which is uniform and has no defect in structure can be accumulated on a substrate.</description><subject>ADHESIVES</subject><subject>APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL</subject><subject>APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHEMISTRY</subject><subject>DYES</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE</subject><subject>METALLURGY</subject><subject>MISCELLANEOUS APPLICATIONS OF MATERIALS</subject><subject>MISCELLANEOUS COMPOSITIONS</subject><subject>NATURAL RESINS</subject><subject>PAINTS</subject><subject>PERFORMING OPERATIONS</subject><subject>POLISHES</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SPRAYING OR ATOMISING IN GENERAL</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1990</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFDzD3J39PN0Vgjx8PRTcPP08VXwdfQLdXN0DgkN8vRzV3BxDfN0duVhYE1LzClO5YXS3AwKbq4hzh66qQX58anFBYnJqXmpJfFeAR4GRuYmBuZGjsZEKAEAeNwjOw</recordid><startdate>19900314</startdate><enddate>19900314</enddate><creator>MOTOMA NOBUHIRO</creator><creator>EKUSA TAKASHI</creator><creator>NAKAYAMA TOSHIO</creator><creator>MIURA AKIRA</creator><scope>EVB</scope></search><sort><creationdate>19900314</creationdate><title>ORGANIC THIN FILM MANUFACTURING DEVICE</title><author>MOTOMA NOBUHIRO ; EKUSA TAKASHI ; NAKAYAMA TOSHIO ; MIURA AKIRA</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JPH0274072A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1990</creationdate><topic>ADHESIVES</topic><topic>APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL</topic><topic>APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHEMISTRY</topic><topic>DYES</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE</topic><topic>METALLURGY</topic><topic>MISCELLANEOUS APPLICATIONS OF MATERIALS</topic><topic>MISCELLANEOUS COMPOSITIONS</topic><topic>NATURAL RESINS</topic><topic>PAINTS</topic><topic>PERFORMING OPERATIONS</topic><topic>POLISHES</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SPRAYING OR ATOMISING IN GENERAL</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>MOTOMA NOBUHIRO</creatorcontrib><creatorcontrib>EKUSA TAKASHI</creatorcontrib><creatorcontrib>NAKAYAMA TOSHIO</creatorcontrib><creatorcontrib>MIURA AKIRA</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>MOTOMA NOBUHIRO</au><au>EKUSA TAKASHI</au><au>NAKAYAMA TOSHIO</au><au>MIURA AKIRA</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>ORGANIC THIN FILM MANUFACTURING DEVICE</title><date>1990-03-14</date><risdate>1990</risdate><abstract>PURPOSE:To enable the manufacture of an organic thin film which is uniform and has no defect in structure by a method wherein at least a detecting probe of a surface pressure gauge is arranged at the position of a movable barrier and a substrate so as to enable the deviation of its detected surface pressure from a set surface pressure to be within 10% after a compressing operation or in an accumulating operation. CONSTITUTION:At least, a detecting probe 14 of a surface pressure gauge is arranged at the position of a movable barrier 12 and a substrate 13 so as to enable the deviation of its surface pressure detected value from a set surface pressure to be within 10% after a compressing operation or in an accumulating operation. And, the surface pressure change due to the barrier 12 at a compressing operation of a molecular film by the barrier 12 can be accurately detected, and the surface pressure decrease of the molecular film near the substrate 13 can be accurately detected at an accumulating operation. Therefore, the surface pressure detected value of the detecting probe 14 of the surface pressure gauge can be used as an index that a moving rate of the movable barrier at the compression of the molecular film and an up-down speed at the accumulation of the molecular film on the substrate are controlled, whereby a molecular film which is uniform and has no defect in structure can be accumulated on a substrate.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
| recordid | cdi_epo_espacenet_JPH0274072A |
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| subjects | ADHESIVES APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS CHEMISTRY DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS PERFORMING OPERATIONS POLISHES SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING |
| title | ORGANIC THIN FILM MANUFACTURING DEVICE |
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