SAMPLE STAGE

PURPOSE:To enable a great many small paths to be made with slight processing so as to reduce the cost of mechanical processing such as cutting, etc., by providing a fluid path consisting of porous material inside the mounting face of a sample. CONSTITUTION:A wafer table 20 forms three-layer structur...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TSUYUSAKI HARUO, SHIMAZU NOBUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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