APPARATUS FOR MEASURING DIFFRACTION EFFICIENCY OF DIFFRACTION GRATING

PURPOSE:To make it possible to measure the diffraction efficiency of a diffraction grating highly accurately by one operation by providing a slide mirror which is slidden along an optical axis, a rotary stage which supports the diffraction grating to be measured and is rotated, and a switching mirro...

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Bibliographische Detailangaben
1. Verfasser: AKITOMO NOBUO
Format: Patent
Sprache:eng
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