THIN AMORPHOUS FILM EXCELLENT IN HIGH-FREQUENCY CHARACTERISTIC AND ITS PRODUCTION

PURPOSE:To form a thin film reduced in magnetostriction, having high electric specific resistivity, excellent in high-frequency characteristics, and also excellent in corrosion resistance and weatherability by forming a thin Fe-Ti-Si amorphous film on a substrate by means of vapor deposition by a sp...

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Bibliographische Detailangaben
Hauptverfasser:	MATSUMOTO FUMIO, MASUMOTO TAKESHI, TERASAKA SHOJI, MIDERA MASAO
Format:	Patent
Sprache:	eng
Schlagworte:	ALLOYS BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY FERROUS OR NON-FERROUS ALLOYS INDUCTANCES INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MAGNETS METALLURGY SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSFORMERS TREATMENT OF ALLOYS OR NON-FERROUS METALS
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